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Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions
Publication:
Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions
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Date
2021-02
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
lebedev, Mikhail
;
Mayer, Thomas
;
van Dorp, Dennis
;
Abrenica, Graniel
;
Arnauts, Sophia
;
Altamirano Sanchez, Efrain
;
De Gendt, Stefan
Journal
Solid State Phenomena
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318
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1658
since deposited on 2021-11-30
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Acq. date: 2025-12-15
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Downloads
318
since deposited on 2021-11-30
90
last month
29
last week
Acq. date: 2025-12-15
Views
1658
since deposited on 2021-11-30
1
last month
Acq. date: 2025-12-15
Citations