Browsing Conference contributions by author "Wagner, C."

Now showing items 1-2 of 2

Advanced 193 nm step and scan technology

Stoeldraijer, J.; Mulkens, J.; Davies, G.; Sytsma, J.; Bakker, H.; Glatzel, H.; Wagner, C.; Roempp, O.; Boerret, R.; Goethals, Mieke (1998)
ArF step-and-scan exposure system for 0.15-μm and 0.13-μm technology nodes

Mulkens, J.; Stoeldraijer, J.; Davies, G.; Dierichs, M.; Heskamp, B.; Moers, M. H.; George, R. A.; Roempp, O.; Glatzel, H.; Wagner, C.; Pollers, Ingrid; Jaenen, Patrick (1999)