Browsing Conference contributions by author "Waehlish, Andre"

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Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

Hoenicke, Philipp; Kayser, Yves; Soltwisch, Victor; Waehlish, Andre; Wauschkuhn, Nils; Scheerder, Jeroen; Fleischmann, Claudia; Bogdanowicz, Janusz; Charley, Anne-Laure; Veloso, Anabela; Loo, Roger; Mertens, Hans; Hikavyy, Andriy; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Ciesielski, Richard; Beckhoff, Burkhard (2023)