Browsing Conference contributions by author "Babu, S.V."
Now showing items 1-2 of 2
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Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes
Sagi, Kaushik; Babu, S.V.; van der Veen, Marleen; Struyf, Herbert; Teugels, Lieve (2016) -
The effect of material texture in the CMP of ruthenium films
Teugels, Lieve; Amanapu, Hariprasad; Sagi, Kaushik; Heylen, Nancy; Babu, S.V. (2013)