Browsing Conference contributions by author "Babin, Sergey"
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The hidden energy tail of low energy electrons in EUV lithography
Fallica, Roberto; Rezvani, Seyed Javid; Nannarone, Stefano; Borisov, Sergei; De Simone, Danilo; Babin, Sergey; Lorusso, Gian; Vandenberghe, Geert (2019)