Browsing Conference contributions by author "Wagner, G."
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Selective etching of SiGe for removal of dummy layers in fully silicided gate artchitectures
Snow, Jim; Vos, Rita; Kottantharayil, Anil; Kraus, Harald; Xu, Kaidong; Grinninger, F.; Wagner, G.; Kovacs, F.; Mertens, Paul (2005)