Browsing Conference contributions by imec author "e460dc949418739bfc1d74fadc05d77a840c7fb5"
Now showing items 1-2 of 2
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Integration of ultralow-k dielectrics using a template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Murdoch, Gayle; Vega Gonzalez, Victor; Verdonck, Patrick; Heylen, Nancy; Zha, Lichen; Wu, Chen; Lesniewska, Alicja; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Lefferts, Scott (2017) -
Overcoated diamond tips for nanometer-scale semiconductor device characterization
Hantschel, Thomas; Tsigkourakos, Menelaos; Kluge, Julia; Werner, Thilo; Zha, Lichen; Paredis, Kristof; Eyben, Pierre; Vandervorst, Wilfried (2014-09)