Authors

Zhang, Liping; de Marneffe, Jean-Francois; Murdoch, Gayle; Vega Gonzalez, Victor; Verdonck, Patrick; Heylen, Nancy; Zha, Lichen; Wu, Chen; Lesniewska, Alicja; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Lefferts, Scott

Conference

MRS Spring Meeting Sympsoium E: Advanced Interconnects for Logic and Memory Applications : Materials, Processes and Integration

Title

Integration of ultralow-k dielectrics using a template replacement approach

Publication type

Meeting abstract