Publication:

Integration of ultralow-k dielectrics using a template replacement approach

Date

2017
Meeting abstract
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Author(s)

Zhang, Liping  
;
de Marneffe, Jean-Francois  
;
Murdoch, Gayle  
;
Vega Gonzalez, Victor  
;
Verdonck, Patrick  
;
Heylen, Nancy  
;
Zha, Lichen  
;
Wu, Chen  
;
Lesniewska, Alicja  
;
Tokei, Zsolt  
;
Boemmels, Juergen  
;
De Gendt, Stefan  
;
Lefferts, Scott

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2000 since deposited on 2021-10-24
Acq. date: 2026-10-10

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