Browsing Conference contributions by author "O'Brien, S. C."

Now showing items 1-2 of 2

Environmentally-friendly chlorine during oxidation

Mertens, Paul; Vermeire, Bert; McGeary, M. J.; Meuris, Marc; Heyns, Marc; Depas, Michel; Sees, J.; O'Brien, S. C.; Gräf, D. (1995)
The dilute HCl integrated pre-gate clean

O'Brien, S. C.; Hurd, Trace; Tipton, C. (1995)