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A high-throughput silicon microphysiometer

dc.contributor.authorVerhaegen, Katarina
dc.contributor.authorBaert, Kris
dc.contributor.authorSimaels, J.
dc.contributor.authorVan Driessche, W.
dc.date.accessioned2021-10-14T11:54:48Z
dc.date.available2021-10-14T11:54:48Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4001
dc.sourceIIOimport
dc.titleA high-throughput silicon microphysiometer
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceProceedings 10th International Conference on Solid State Sensors and Actuators - Transducers
dc.source.conferencedate6/06/1999
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - open access


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