Notice

This item has not yet been validated by imec staff.

Notice

This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/40082.2

Show simple item record

Low-temperature atomic and molecular hydrogen anneals for enhanced chemical SiO2 IL quality in low thermal budget RMG stacks

dc.contributor.authorFranco, J.
dc.contributor.authorArimura, H.
dc.contributor.authorde Marneffe, J-F
dc.contributor.authorWu, Z.
dc.contributor.authorVandooren, A.
dc.contributor.authorRagnarsson, L-A
dc.contributor.authorLitta, E. Dentoni
dc.contributor.authorHoriguchi, N.
dc.contributor.authorCroes, K.
dc.contributor.authorLinten, D.
dc.contributor.authorAfanas'ev, V
dc.contributor.authorGrasser, T.
dc.contributor.authorKaczer, B.
dc.date.accessioned2022-07-09T02:27:25Z
dc.date.available2022-07-09T02:27:25Z
dc.date.issued2021
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000812325400158
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40082
dc.sourceWOS
dc.titleLow-temperature atomic and molecular hydrogen anneals for enhanced chemical SiO2 IL quality in low thermal budget RMG stacks
dc.typeProceedings paper
dc.contributor.imecauthorFranco, J.
dc.contributor.imecauthorArimura, H.
dc.contributor.imecauthorde Marneffe, J-F
dc.contributor.imecauthorWu, Z.
dc.contributor.imecauthorVandooren, A.
dc.contributor.imecauthorRagnarsson, L-A
dc.contributor.imecauthorLitta, E. Dentoni
dc.contributor.imecauthorHoriguchi, N.
dc.contributor.imecauthorCroes, K.
dc.contributor.imecauthorLinten, D.
dc.contributor.imecauthorAfanas'ev, V
dc.contributor.imecauthorGrasser, T.
dc.contributor.imecauthorKaczer, B.
dc.identifier.doi10.1109/IEDM19574.2021.9720657
dc.identifier.eisbn978-1-6654-2572-8
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 11-16, 2021
dc.source.conferencelocationSan Francisco
imec.availabilityUnder review


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/40082.22022-08-25T15:52:09Zvalidation by library/open access desk
120.500.12860/40082*2022-07-09T02:27:25Z

*Selected version