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Heavy doping effects in silicon

dc.contributor.authorVan Mieghem, Piet
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-09-29T12:50:01Z
dc.date.available2021-09-29T12:50:01Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/400
dc.sourceIIOimport
dc.titleHeavy doping effects in silicon
dc.typeBook chapter
dc.contributor.imecauthorMertens, Robert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3
dc.source.bookAdvanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices
dc.source.endpage33
imec.availabilityPublished - open access
imec.internalnotesChapter 1


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