Investigation of the formation of M-2(+)-molecular ions in sputtering processes

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Authors

Vlekken, J.; Croes, Kris; Wu, Ting-Di; D'Olieslaeger, Marc; Knuyt, G.; Vandervorst, Wilfried; De Schepper, Luc

Issue

3

Journal

Journal of the American Society for Mass Spectrometry

Volume

10

Title

Investigation of the formation of M-2(+)-molecular ions in sputtering processes

Publication type

Journal article

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