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Investigation of the formation of M-2(+)-molecular ions in sputtering processes

dc.contributor.authorVlekken, J.
dc.contributor.authorCroes, Kris
dc.contributor.authorWu, Ting-Di
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorKnuyt, G.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Schepper, Luc
dc.date.accessioned2021-10-14T11:55:59Z
dc.date.available2021-10-14T11:55:59Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4012
dc.sourceIIOimport
dc.titleInvestigation of the formation of M-2(+)-molecular ions in sputtering processes
dc.typeJournal article
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage246
dc.source.endpage253
dc.source.journalJournal of the American Society for Mass Spectrometry
dc.source.issue3
dc.source.volume10
imec.availabilityPublished - imec


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