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Scaling study of contact operation at constant current in self-aligned top-gated oxide semiconductor field-effect transistors
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Authors
Chien, Yu-Chieh
;
Nag, Manoj
;
Genoe, Jan
;
Rolin, Cedric
DOI
10.1016/j.sse.2022.108406
ISSN
0038-1101
Issue
September
Journal
SOLID-STATE ELECTRONICS
Volume
195
Title
Scaling study of contact operation at constant current in self-aligned top-gated oxide semiconductor field-effect transistors
Publication type
Journal article
Embargo date
9999-12-31
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3
20.500.12860/40178.3
*
2022-08-29T07:35:48Z
validation by library/open access desk
2
20.500.12860/40178.2
2022-07-29T08:08:17Z
validation by imec author
1
20.500.12860/40178
2022-07-28T02:30:39Z
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