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110GHz Through-Silicon Via's Integrated in Silicon Photonics Interposers for Next-Generation Optical Modules

dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorBan, Yoojin
dc.contributor.authorPantano, Nicolas
dc.contributor.authorSun, Xiao
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBogaerts, Lieve
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorVan Campenhout, Joris
dc.date.accessioned2022-07-31T02:29:17Z
dc.date.available2022-07-31T02:29:17Z
dc.date.issued2021
dc.identifier.otherWOS:000821936000094
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40189
dc.sourceWOS
dc.title110GHz Through-Silicon Via's Integrated in Silicon Photonics Interposers for Next-Generation Optical Modules
dc.typeProceedings paper
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorBan, Yoojin
dc.contributor.imecauthorPantano, Nicolas
dc.contributor.imecauthorSun, Xiao
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBogaerts, Lieve
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.identifier.doi10.1109/ECOC52684.2021.9605927
dc.identifier.eisbn978-1-6654-3868-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceEuropean Conference on Optical Communication (ECOC)
dc.source.conferencedateSEP 13-16, 2021
dc.source.conferencelocationBordeaux
imec.availabilityUnder review


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220.500.12860/40189.22022-11-08T08:36:20Zvalidation by library/open access desk
120.500.12860/40189*2022-07-31T02:29:17Z

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