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High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE
dc.contributor.author | Kundu, Shreya | |
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Bezard, Philippe | |
dc.contributor.author | Nalin Mehta, Ankit | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Lazzarino, Frederic | |
dc.date.accessioned | 2022-08-19T09:22:58Z | |
dc.date.available | 2022-08-05T02:35:40Z | |
dc.date.available | 2022-08-19T09:22:58Z | |
dc.date.issued | 2022-07-19 | |
dc.identifier.issn | 1944-8244 | |
dc.identifier.other | WOS:000831516200001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40204.2 | |
dc.source | WOS | |
dc.title | High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE | |
dc.type | Journal article | |
dc.type | Journal article (pre-print) | |
dc.contributor.imecauthor | Kundu, Shreya | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Bezard, Philippe | |
dc.contributor.imecauthor | Nalin Mehta, Ankit | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.orcidimec | Kundu, Shreya::0000-0001-8052-7774 | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Nalin Mehta, Ankit::0000-0002-2169-940X | |
dc.identifier.doi | 10.1021/acsami.2c07514 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Materials science | |
dc.source.journal | ACS APPLIED MATERIALS & INTERFACES | |
dc.identifier.pmid | MEDLINE:35850517 | |
dc.source.issue | 29 | |
dc.source.volume | 14 | |
imec.availability | Under review |