ISSN
1944-8244
PMID
MEDLINE:35850517
Issue
29
Journal
ACS APPLIED MATERIALS & INTERFACES
Volume
14
Research discipline
Materials science
Title
High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE
Publication type
Journal article
Embargo date
9999-12-31