Publication:

High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE

Date

2022-07-19
Journal article
https://doi.org/10.1021/acsami.2c07514
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Published version 6.35 MB

Author(s)

Kundu, Shreya  
;
Decoster, Stefan  
;
Bezard, Philippe  
;
Nalin Mehta, Ankit  
;
Dekkers, Harold  
;
Lazzarino, Frederic  

Journal

ACS APPLIED MATERIALS & INTERFACES

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