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High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE
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Acq. date: 2026-08-09
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6 since deposited on 2022-08-05
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1782 since deposited on 2022-08-05
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Acq. date: 2026-08-09
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