Publication:

High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE

Date

2022-07-19
Journal article
https://doi.org/10.1021/acsami.2c07514
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 6.35 MB

Author(s)

Kundu, Shreya  
;
Decoster, Stefan  
;
Bezard, Philippe  
;
Nalin Mehta, Ankit  
;
Dekkers, Harold  
;
Lazzarino, Frederic  

Journal

ACS APPLIED MATERIALS & INTERFACES

Abstract

Description

Metrics

Downloads

6 since deposited on 2022-08-05
Acq. date: 2025-12-15

Views

1773 since deposited on 2022-08-05
3last month
Acq. date: 2025-12-15

Citations

Metrics

Downloads

6 since deposited on 2022-08-05
Acq. date: 2025-12-15

Views

1773 since deposited on 2022-08-05
3last month
Acq. date: 2025-12-15

Citations