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dc.contributor.authorPei, Zhenlin
dc.contributor.authorCatthoor, Francky
dc.contributor.authorTokei, Zsolt
dc.contributor.authorPan, Chenyun
dc.date.accessioned2022-08-09T02:37:56Z
dc.date.available2022-08-09T02:37:56Z
dc.date.issued2022
dc.identifier.issn1536-125X
dc.identifier.otherWOS:000833748000002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40235
dc.sourceWOS
dc.titleBeyond-Cu Intermediate-Length Interconnect Exploration for SRAM Application
dc.typeJournal article
dc.contributor.imecauthorCatthoor, Francky
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCatthoor, Francky::0000-0002-3599-8515
dc.identifier.doi10.1109/TNANO.2022.3157952
dc.source.numberofpages7
dc.source.peerreviewyes
dc.source.beginpage367
dc.source.endpage373
dc.source.journalIEEE TRANSACTIONS ON NANOTECHNOLOGY
dc.source.volume21
imec.availabilityUnder review


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