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Effect of top electrode deposition conditions on the reliability of Tt/PZT/Pt ferroelectric capacitors

dc.contributor.authorWouters, Dirk
dc.contributor.authorBartic, Andrei
dc.contributor.authorNorga, Gerd
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T11:58:14Z
dc.date.available2021-10-14T11:58:14Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4032
dc.sourceIIOimport
dc.titleEffect of top electrode deposition conditions on the reliability of Tt/PZT/Pt ferroelectric capacitors
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference11th International Symposium on Integrated Ferroelectrics - ISIF
dc.source.conferencedate7/03/1999
dc.source.conferencelocationColorado Springs, CO USA
imec.availabilityPublished - imec


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