Publication:
Integration of PZT ferroelectric capacitors in submicron CMOS processes: results and future challenges
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2002 since deposited on 2021-10-14
Acq. date: 2025-12-12
Citations
Metrics
Views
2002 since deposited on 2021-10-14
Acq. date: 2025-12-12
Citations