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Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN
dc.contributor.author | Morris, Richard J. H. | |
dc.contributor.author | Cuduvally, Ramya | |
dc.contributor.author | Lin, Jhao-Rong | |
dc.contributor.author | Zhao, Ming | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Thuvander, Mattias | |
dc.contributor.author | Fleischmann, Claudia | |
dc.date.accessioned | 2022-09-04T02:39:18Z | |
dc.date.available | 2022-09-04T02:39:18Z | |
dc.date.issued | 2022-11 | |
dc.identifier.issn | 0304-3991 | |
dc.identifier.other | WOS:000844973000001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40337 | |
dc.source | WOS | |
dc.title | Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN | |
dc.type | Journal article | |
dc.contributor.imecauthor | Morris, Richard J. H. | |
dc.contributor.imecauthor | Cuduvally, Ramya | |
dc.contributor.imecauthor | Lin, Jhao-Rong | |
dc.contributor.imecauthor | Zhao, Ming | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Fleischmann, Claudia | |
dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
dc.identifier.doi | 10.1016/j.ultramic.2022.113592 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.journal | ULTRAMICROSCOPY | |
dc.identifier.pmid | MEDLINE:35988476 | |
dc.source.volume | 241 | |
imec.availability | Under review |
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