Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN
Metadata
Show full item record
Authors
Morris, Richard
;
Cuduvally, Ramya
;
Lin, Jhao-Rong
;
Zhao, Ming
;
Vandervorst, Wilfried
;
Thuvander, Mattias
;
Fleischmann, Claudia
DOI
10.1016/j.ultramic.2022.113592
ISSN
0304-3991
PMID
MEDLINE:35988476
Issue
November
Journal
ULTRAMICROSCOPY
Volume
241
Title
Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN
Publication type
Journal article
Collections
Articles
Version history
Version
Item
Date
Summary
2
20.500.12860/40337.2
*
2023-04-06T15:27:27Z
validation by library/open access desk
1
20.500.12860/40337
2022-09-04T02:39:18Z
*Selected version
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login