Browsing by author "Fleischmann, Claudia"
Now showing items 1-20 of 107
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3D dopant profiling in silicon nanowires
Fleischmann, Claudia; Melkonyan, Davit; Arnoldi, Laurent; Bogdanowicz, Janusz; Kumar, Arul; Veloso, Anabela; Vandervorst, Wilfried (2016) -
3D imaging of atom probe tip shapes with atomic force microscopy
Fleischmann, Claudia; Paredis, Kristof; Melkonyan, Davit; Op de Beeck, Jonathan; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A Bottom-Up Volume Reconstruction Method for Atom Probe Tomography
Cools, Sigfried; Ling, Yu Ting; Bogdanowicz, Janusz; Fleischmann, Claudia; De Beenhouwer, Jan; Sijbers, Jan; Vandervorst, Wilfried (2022) -
A combined SPM/TOFSIMS tool to obtain real chemical 3D information
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Conard, Thierry; Vandervorst, Wilfried (2017) -
A compact vibration reduced set-up for scanning nm-XRF and STXM
Lubeck, Janin; Seim, Christian; Dehlinger, Aurelie; Haidl, Andreas; Hoenicke, Philipp; Kayser, Yves; Unterumsberger, Rainer; Fleischmann, Claudia; Beckhoff, Burkhard (2018) -
A correlative ToF-SIMS/SPM methodology for probing 3D devices
Spampinato, Valentina; Dialameh, Masoud; Franquet, Alexis; Fleischmann, Claudia; Conard, Thierry; van der Heide, Paul; Vandervorst, Wilfried (2020) -
A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A layer-by-layer reconstruction method including field of view effects, missing atoms and laser effects
Ling, Yu Ting; Bogdanowicz, Janusz; Fleischmann, Claudia; Vandervorst, Wilfried (2018) -
A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Dialameh, Masoud; Scheerder, Jeroen; Morris, Richard; Meersschaut, Johan; Richard, Olivier; Vandervorst, Wilfried; van der Heide, Paul; Fleischmann, Claudia (2021) -
Accuracy in APT analysis: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Vandervorst, Wilfried (2017) -
Accurate stoichiometric analysis of Al1 xGaxN/GaN structures using APT and the influence of laser, poles and zone lines
Morris, Richard; Arnoldi, Laurent; Cuduvally, Ramya; Melkonyan, Davit; Fleischmann, Claudia; Zhao, Ming; Vandervorst, Wilfried (2017) -
Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
Dorney, Kevin; Kissoon, Nicola; Holzmeier, Fabian; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Makhotkin, Igor; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John (2023-04-28) -
Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Adsorption of O2 on Ge(100): Atomic geometry and site-specific electronic structure
Fleischmann, Claudia; Schouteden, K.; Merckling, Clement; Sioncke, Sonja; Meuris, Marc; Van Haesendonck, C.; Temst, K.; Vantomme, A. (2012) -
Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography
Kundu, Paromita; Fleischmann, Claudia; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; van der Heide, Paul (2018) -
ALD on high mobility channels: engineering the proper gate stack passivation
Sioncke, Sonja; Lin, Hang Chun; Adelmann, Christoph; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, K.; Vantomme, Andre; Muller, Matthias; Kolbe, Michael; Beckhoff, Burkhard; Schmeisser, Dieter; Tallarida, Massimo (2010) -
ALD on high mobility channels: engineering the proper gate stack passivation
Sioncke, Sonja; Lin, Dennis; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Caymax, Matty; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, Kristiaan; Vantomme, Andre; Beckhoff, Burkhard (2010) -
Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation
van Dorp, Dennis; Nyns, Laura; Cuypers, Daniel; Ivanov, Tsvetan; Brizzi, Simone; Tallarida, Massimo; Fleischmann, Claudia; Hönicke, Philipp; Müller, Matthias; Richard, Olivier; Schmeisser, Dieter; De Gendt, Stefan; Lin, Dennis; Adelmann, Christoph (2019) -
APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
Melkonyan, Davit; Fleischmann, Claudia; Veloso, Anabela; Arnoldi, Laurent; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2016) -
APT tip shape imaging by SPM
Op de Beeck, Jonathan; Fleischmann, Claudia; Paredis, Kristof; van der Heide, Paul; Vandervorst, Wilfried (2019)