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Integration of Pt/PZT/Pt ferroelectric capacitors into 0.5μm CMOS process for embedded FERAM

dc.contributor.authorWouters, Dirk
dc.contributor.authorNorga, Gerd
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDeferm, Ludo
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T11:58:28Z
dc.date.available2021-10-14T11:58:28Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4034
dc.sourceIIOimport
dc.titleIntegration of Pt/PZT/Pt ferroelectric capacitors into 0.5μm CMOS process for embedded FERAM
dc.typeOral presentation
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDeferm, Ludo
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.source.peerreviewno
dc.source.conference11th International Symposium on Integrated Ferroelectrics - ISIF
dc.source.conferencedate7/03/1999
dc.source.conferencelocationColorado Springs, Co USA
imec.availabilityPublished - imec


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