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Ultra-thin PZT films for low-voltage ferroelectric non-volatile memories

dc.contributor.authorWouters, Dirk
dc.contributor.authorNorga, Gerd
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T11:58:34Z
dc.date.available2021-10-14T11:58:34Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4035
dc.sourceIIOimport
dc.titleUltra-thin PZT films for low-voltage ferroelectric non-volatile memories
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage381
dc.source.endpage391
dc.source.conferenceFerroelectric Thin Films VII
dc.source.conferencedate30/11/1998
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 541


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