dc.contributor.author | Saib, Mohamed | |
dc.contributor.author | Lorusso, Gian | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Kondo, Tsuyoshi | |
dc.contributor.author | Shindo, Hiroyuki | |
dc.contributor.author | Ebizuka, Yasushi | |
dc.contributor.author | Ban, Naoma | |
dc.contributor.author | Ikota, Masami | |
dc.date.accessioned | 2023-06-08T12:58:40Z | |
dc.date.available | 2022-09-08T02:38:39Z | |
dc.date.available | 2023-06-08T12:58:40Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4981-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844549800029 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40371.3 | |
dc.source | WOS | |
dc.title | Regularized Autoencoder for The Analysis of Multivariate Metrology Data | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Saib, Mohamed | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.orcidimec | Charley, Anne-Laure::0000-0003-4745-0167 | |
dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
dc.identifier.doi | 10.1117/12.2613729 | |
dc.identifier.eisbn | 978-1-5106-4982-8 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 120530V | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference | |
dc.source.conferencedate | FEB 24-MAY 27, 2022 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12053 | |
imec.availability | Published - imec | |