Show simple item record

EUV based multi-patterning schemes for advanced DRAM nodes

dc.contributor.authorDas, Sayantan
dc.contributor.authorSah, Kaushik
dc.contributor.authorFallica, Roberto
dc.contributor.authorChen, Zhijin
dc.contributor.authorHalder, Sandip
dc.contributor.authorCross, Andrew
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorTreska, Fergo
dc.contributor.authorLeray, Philippe
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorMaguire, Ethan
dc.contributor.authorWei, Chih-, I
dc.contributor.authorFenger, Germain
dc.contributor.authorLafferty, Neal
dc.contributor.authorLee, Jeonghoon
dc.date.accessioned2023-06-20T11:46:58Z
dc.date.available2022-09-08T02:38:56Z
dc.date.available2023-06-20T11:46:58Z
dc.date.issued2022
dc.identifier.isbn978-1-5106-4985-9
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000844546500002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40373.2
dc.sourceWOS
dc.titleEUV based multi-patterning schemes for advanced DRAM nodes
dc.typeProceedings paper
dc.contributor.imecauthorDas, Sayantan
dc.contributor.imecauthorFallica, Roberto
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorTreska, Fergo
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorLee, Jeonghoon
dc.contributor.orcidimecDas, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimecFallica, Roberto::0000-0003-4523-9624
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecTreska, Fergo::0000-0002-0171-5847
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.identifier.doi10.1117/12.2615644
dc.identifier.eisbn978-1-5106-4986-6
dc.source.numberofpages10
dc.source.peerreviewyes
dc.source.beginpageArt. 1205503
dc.source.conferenceConference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedateAPR 24-MAY 27, 2022
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12055
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/40373.2*2023-06-20T11:43:37Zvalidation by library/open access desk
120.500.12860/403732022-09-08T02:38:56Z

*Selected version