| dc.contributor.author | Mehendale, Manjusha | |
| dc.contributor.author | Antonelli, Andy | |
| dc.contributor.author | Mair, Robin | |
| dc.contributor.author | Mukundhan, Priya | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Blanco, Victor | |
| dc.contributor.author | Charley, Anne-Laure | |
| dc.contributor.author | Leray, Philippe | |
| dc.date.accessioned | 2023-06-15T13:30:55Z | |
| dc.date.available | 2022-09-08T02:38:59Z | |
| dc.date.available | 2023-06-15T13:30:55Z | |
| dc.date.issued | 2022 | |
| dc.identifier.isbn | 978-1-5106-4981-1 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.other | WOS:000844549800037 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40379.2 | |
| dc.source | WOS | |
| dc.title | Imaging of buried overlay and alignment markers using picosecond acoustic microscopy | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Blanco, Victor | |
| dc.contributor.imecauthor | Charley, Anne-Laure | |
| dc.contributor.imecauthor | Leray, Philippe | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.contributor.orcidimec | Blanco, Victor::0000-0003-4308-0381 | |
| dc.contributor.orcidimec | Charley, Anne-Laure::0000-0003-4745-0167 | |
| dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
| dc.identifier.doi | 10.1117/12.2614295 | |
| dc.identifier.eisbn | 978-1-5106-4982-8 | |
| dc.source.numberofpages | 5 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | Art. 1205313 | |
| dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference | |
| dc.source.conferencedate | FEB 24-MAY 27, 2022 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.volume | 12053 | |
| imec.availability | Published - imec | |
