Imaging of buried overlay and alignment markers using picosecond acoustic microscopy

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dc.contributor.author	Mehendale, Manjusha
dc.contributor.author	Antonelli, Andy
dc.contributor.author	Mair, Robin
dc.contributor.author	Mukundhan, Priya
dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Blanco, Victor
dc.contributor.author	Charley, Anne-Laure
dc.contributor.author	Leray, Philippe
dc.date.accessioned	2022-09-08T02:38:59Z
dc.date.available	2022-09-08T02:38:59Z
dc.date.issued	2022
dc.identifier.isbn	978-1-5106-4981-1
dc.identifier.issn	0277-786X
dc.identifier.other	WOS:000844549800037
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40379
dc.source	WOS
dc.title	Imaging of buried overlay and alignment markers using picosecond acoustic microscopy
dc.type	Proceedings paper
dc.contributor.imecauthor	Bogdanowicz, Janusz
dc.contributor.imecauthor	Blanco, Victor
dc.contributor.imecauthor	Charley, Anne-Laure
dc.contributor.imecauthor	Leray, Philippe
dc.contributor.orcidimec	Bogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimec	Blanco, Victor::0000-0003-4308-0381
dc.contributor.orcidimec	Charley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimec	Leray, Philippe::0000-0002-1086-270X
dc.identifier.doi	10.1117/12.2614295
dc.identifier.eisbn	978-1-5106-4982-8
dc.source.numberofpages	5
dc.source.peerreview	yes
dc.source.conference	Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedate	FEB 24-MAY 27, 2022
dc.source.volume	12053
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/40379.2	2023-06-15T13:29:43Z	validation by library/open access desk
1	20.500.12860/40379*	2022-09-08T02:38:59Z