Publication:

Subsurface Scanning Probe Metrology for Overlay through Opaque Layers

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2616093

Simple item page Full metadata Statistics

Author(s)

;

;

Mucientes, M. S. J.

;

;

;

Bogdanowicz, Janusz

;

;

;

;

;

Charley, Anne-Laure

;

Leray, Philippe

;

van Reijzen, M. E.

;

;

Journal

Proceedings of SPIE

Statistics

1531 since deposited on 2022-09-08

Acq. date: 2026-02-25