Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

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dc.contributor.author	Neumann, Jens Timo
dc.contributor.author	Srikantha, Abhilash
dc.contributor.author	Huthwohl, Philipp
dc.contributor.author	Lee, Keumsil
dc.contributor.author	William, James B.
dc.contributor.author	Korb, Thomas
dc.contributor.author	Foca, Eugen
dc.contributor.author	Garbowski, Tomasz
dc.contributor.author	Boecker, Daniel
dc.contributor.author	Das, Sayantan
dc.contributor.author	Halder, Sandip
dc.date.accessioned	2022-09-08T02:39:18Z
dc.date.available	2022-09-08T02:39:18Z
dc.date.issued	2022
dc.identifier.isbn	978-1-5106-4981-1
dc.identifier.issn	0277-786X
dc.identifier.other	WOS:000844549800017
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40389
dc.source	WOS
dc.title	Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
dc.type	Proceedings paper
dc.contributor.imecauthor	Das, Sayantan
dc.contributor.imecauthor	Halder, Sandip
dc.contributor.orcidimec	Das, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimec	Halder, Sandip::0000-0002-6314-2685
dc.identifier.doi	10.1117/12.2619766
dc.identifier.eisbn	978-1-5106-4982-8
dc.source.numberofpages	10
dc.source.peerreview	yes
dc.source.conference	Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedate	FEB 24-MAY 27, 2022
dc.source.volume	12053
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/40389.2	2023-04-27T15:23:23Z	validation by library/open access desk
1	20.500.12860/40389*	2022-09-08T02:39:18Z