Authors
Neumann, Jens Timo;
Srikantha, Abhilash;
Huthwohl, Philipp;
Lee, Keumsil;
William, James B.;
Korb, Thomas;
Foca, Eugen;
Garbowski, Tomasz;
Boecker, Daniel;
Das, Sayantan;
Halder, Sandip
EISBN
978-1-5106-4982-8
ISBN
978-1-5106-4981-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
Journal
Proceedings of SPIE
Volume
12053
Title
Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
Publication type
Proceedings paper
Embargo date
9999-12-31