Browsing by author "Neumann, Jens Timo"
Now showing items 1-12 of 12
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Actinic characterization and modeling of the EUV mask stack
Philipsen, Vicky; Hendrickx, Eric; Jonckheere, Rik; Davydova, Natalia; Fliervoet, Timon; Neumann, Jens Timo (2013) -
Alternative EUV mask technology for mask 3D effect compensation
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Knops, Roel; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2014) -
Alternative EUV mask technology to compensate for mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions
Bekaert, Joost; Van Look, Lieve; Vandenberghe, Geert; Van Adrichem, Paul; Maslow, Mark J.; Gemmink, Jan-Willem; Cao, Hua; Hunsche, Stefan; Neumann, Jens Timo; Wolf, Alexander (2011) -
Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
Neumann, Jens Timo; Srikantha, Abhilash; Huethwohl, Philipp; Lee, Keumsil; William, B. James; Korb, Thomas; Foca, Eugen; Garbowski, Tomasz; Boecker, Daniel; Das, Sayantan; Halder, Sandip (2023) -
Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
Neumann, Jens Timo; Srikantha, Abhilash; Huthwohl, Philipp; Lee, Keumsil; William, James B.; Korb, Thomas; Foca, Eugen; Garbowski, Tomasz; Boecker, Daniel; Das, Sayantan; Halder, Sandip (2022) -
Experimental validation of novel EUV mask technology to reduce mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Experimental validation of novel mask technology to reduce mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Hsu, Stephen; Liu, Hua Yu; Mouraille, Orion; Schreel, Koen; Dusa, Mircea; Zimmermann, Joerg; Gräupner, Paul; Neumann, Jens Timo (2011-03) -
Impact of mask stack on high NA EUV imaging
Philipsen, Vicky; Hendrickx, Eric; Jonckheere, Rik; Vandenberghe, Geert; Davydova, Natalia; Fliervoet, Timon; Neumann, Jens Timo (2012) -
Mask 3D effect mitigation by source optimization and assist feature placement
Van Look, Lieve; Mochi, Iacopo; Philipsen, Vicky; Gallagher, Emily; Hendrickx, Eric; McIntyre, Greg; Wittebrood, Friso; Lyakhova, Kateryna; de Winter, Laurens; Last, Thorsten; Fliervoet, Timon; Schiffelers, Guido; Finders, Jo; Van Adrichem, Paul; Lyons, Adam; Laenens, Bart; Liddle, Jack; Neumann, Jens Timo (2016) -
Scanner matching for standard and freeform illumination shapes using FlexRay
Bekaert, Joost; Van Look, Lieve; D'have, Koen; Laenens, Bart; Vandenberghe, Geert; Van Adrichem, Paul; Shao, Wenjin; Ghan, J.; Schreel, Koen; Neumann, Jens Timo (2011)