Publication:

Actinic characterization and modeling of the EUV mask stack

Date

2013

Proceedings Paper

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Author(s)

Philipsen, Vicky

;

Hendrickx, Eric

;

Jonckheere, Rik

;

Davydova, Natalia

;

Fliervoet, Timon

;

Neumann, Jens Timo

Statistics

1992 since deposited on 2021-10-21

Acq. date: 2026-06-05