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Conference contributions
Actinic characterization and modeling of the EUV mask stack
Publication:
Actinic characterization and modeling of the EUV mask stack
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Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Vicky
;
Hendrickx, Eric
;
Jonckheere, Rik
;
Davydova, Natalia
;
Fliervoet, Timon
;
Neumann, Jens Timo
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1978
since deposited on 2021-10-21
3
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1978
since deposited on 2021-10-21
3
last month
Acq. date: 2025-12-11
Citations