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Mask 3D effect mitigation by source optimization and assist feature placement
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Authors
Van Look, Lieve
;
Mochi, Iacopo
;
Philipsen, Vicky
;
Gallagher, Emily
;
Hendrickx, Eric
;
McIntyre, Greg
;
Wittebrood, Friso
;
Lyakhova, Kateryna
;
de Winter, Laurens
;
Last, Thorsten
;
Fliervoet, Timon
;
Schiffelers, Guido
;
Finders, Jo
;
Van Adrichem, Paul
;
Lyons, Adam
;
Laenens, Bart
;
Liddle, Jack
;
Neumann, Jens Timo
Conference
International Symposium on Extreme Ultraviolet Lithography - EUVL
Title
Mask 3D effect mitigation by source optimization and assist feature placement
Publication type
Proceedings paper
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