Publication:

Mask 3D effect mitigation by source optimization and assist feature placement

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Van Look, Lieve

;

;

Philipsen, Vicky

;

Gallagher, Emily

;

Hendrickx, Eric

;

;

Wittebrood, Friso

;

Lyakhova, Kateryna

;

de Winter, Laurens

;

;

Fliervoet, Timon

;

Schiffelers, Guido

;

;

Van Adrichem, Paul

;

;

;

;

Neumann, Jens Timo

Statistics

2026 since deposited on 2021-10-23

2last month

Acq. date: 2026-01-26