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Mask 3D effect mitigation by source optimization and assist feature placement
Publication:
Mask 3D effect mitigation by source optimization and assist feature placement
Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Look, Lieve
;
Mochi, Iacopo
;
Philipsen, Vicky
;
Gallagher, Emily
;
Hendrickx, Eric
;
McIntyre, Greg
;
Wittebrood, Friso
;
Lyakhova, Kateryna
;
de Winter, Laurens
;
Last, Thorsten
;
Fliervoet, Timon
;
Schiffelers, Guido
;
Finders, Jo
;
Van Adrichem, Paul
;
Lyons, Adam
;
Laenens, Bart
;
Liddle, Jack
;
Neumann, Jens Timo
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Abstract
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2023
since deposited on 2021-10-23
Acq. date: 2025-10-27
Citations
Metrics
Views
2023
since deposited on 2021-10-23
Acq. date: 2025-10-27
Citations