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Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
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Authors
Neumann, Jens Timo
;
Srikantha, Abhilash
;
Huethwohl, Philipp
;
Lee, Keumsil
;
William, B. James
;
Korb, Thomas
;
Foca, Eugen
;
Garbowski, Tomasz
;
Boecker, Daniel
;
Das, Sayantan
;
Halder, Sandip
DOI
10.1117/1.JMM.22.2.021009
ISSN
1932-5150
Issue
2
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
22
Title
Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
Publication type
Journal article
Embargo date
9999-12-31
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Summary
2
20.500.12860/43359.2
*
2024-03-04T13:16:15Z
validation by library/open access desk
1
20.500.12860/43359
2024-01-08T17:19:01Z
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