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Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

dc.contributor.authorNeumann, Jens Timo
dc.contributor.authorSrikantha, Abhilash
dc.contributor.authorHuthwohl, Philipp
dc.contributor.authorLee, Keumsil
dc.contributor.authorWilliam, James B.
dc.contributor.authorKorb, Thomas
dc.contributor.authorFoca, Eugen
dc.contributor.authorGarbowski, Tomasz
dc.contributor.authorBoecker, Daniel
dc.contributor.authorDas, Sayantan
dc.contributor.authorHalder, Sandip
dc.date.accessioned2023-04-27T15:30:31Z
dc.date.available2022-09-08T02:39:18Z
dc.date.available2023-04-27T15:30:31Z
dc.date.issued2022
dc.identifier.isbn978-1-5106-4981-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000844549800017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40389.2
dc.sourceWOS
dc.titleDefect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
dc.typeProceedings paper
dc.contributor.imecauthorDas, Sayantan
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecDas, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.embargo9999-12-31
dc.identifier.doi10.1117/12.2619766
dc.identifier.eisbn978-1-5106-4982-8
dc.source.numberofpages10
dc.source.peerreviewyes
dc.source.beginpageArt. 1203501
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedateFEB 24-MAY 27, 2022
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12053
imec.availabilityPublished - imec


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220.500.12860/40389.2*2023-04-27T15:23:23Zvalidation by library/open access desk
120.500.12860/403892022-09-08T02:39:18Z

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