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High-Performance 300mm Integrated Superconducting Resonators for Quantum Computing Applications

dc.contributor.authorMongillo, Massimo
dc.contributor.authorPotocnik, Anton
dc.contributor.authorVerjauw, Jeroen
dc.contributor.authorMohiyaddin, Fahd Ayyalil
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorAcharya, Rohith
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorPerez Lozano, Daniel
dc.contributor.authorWan, Danny
dc.contributor.authorPacco, Antoine
dc.contributor.authorJussot, Julien
dc.contributor.authorSouriau, Laurent
dc.contributor.authorAnanthapadmanabha Rao, Vadiraj
dc.contributor.authorSwerts, Johan
dc.contributor.authorCouet, Sebastien
dc.contributor.authorGoux, Ludovic
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorRadu, Iuliana
dc.date.accessioned2022-09-08T14:36:42Z
dc.date.available2022-09-08T14:36:42Z
dc.date.issued2021
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000812325400149
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40399
dc.sourceWOS
dc.titleHigh-Performance 300mm Integrated Superconducting Resonators for Quantum Computing Applications
dc.typeProceedings paper
dc.contributor.imecauthorMongillo, Massimo
dc.contributor.imecauthorPotocnik, Anton
dc.contributor.imecauthorVerjauw, Jeroen
dc.contributor.imecauthorMohiyaddin, Fahd Ayyalil
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorAcharya, Rohith
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorPerez Lozano, Daniel
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorJussot, Julien
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorAnanthapadmanabha Rao, Vadiraj
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecVerjauw, J.::0000-0002-4215-8688
dc.contributor.orcidimecSouriau, L.::0000-0002-5138-5938
dc.contributor.orcidimecCouet, S.::0000-0001-6436-9593
dc.contributor.orcidimecGovoreanu, B.::0000-0001-7210-2979
dc.contributor.orcidimecMongillo, Massimo::0000-0002-6475-6320
dc.contributor.orcidimecPotocnik, Anton::0000-0002-0352-6388
dc.contributor.orcidimecVerjauw, Jeroen::0000-0002-4215-8688
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecAcharya, Rohith::0000-0003-3958-6435
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecJussot, Julien::0000-0002-2484-3462
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecAnanthapadmanabha Rao, Vadiraj::0000-0001-8676-5044
dc.contributor.orcidimecCouet, Sebastien::0000-0001-6436-9593
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.embargo9999-12-31
dc.identifier.doi10.1109/IEDM19574.2021.9720648
dc.identifier.eisbn978-1-6654-2572-8
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 11-16, 2021
dc.source.conferencelocationSan Francisco
dc.source.journalna
imec.availabilityPublished - imec


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