| dc.contributor.author | Edinger, Pierre | |
| dc.contributor.author | Kristinsson, Kristofer | |
| dc.contributor.author | Errando-Herranz, Carlos | |
| dc.contributor.author | Takabayashi, Alain Yuji | |
| dc.contributor.author | Sattari, Hamed | |
| dc.contributor.author | Quack, Niels | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Bogaerts, Wim | |
| dc.contributor.author | Gylfason, Kristinn B. | |
| dc.date.accessioned | 2022-09-21T08:10:02Z | |
| dc.date.available | 2022-09-09T02:41:54Z | |
| dc.date.available | 2022-09-21T08:10:02Z | |
| dc.date.issued | 2021 | |
| dc.identifier.issn | 2160-9020 | |
| dc.identifier.other | WOS:000831479802308 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40400.2 | |
| dc.source | WOS | |
| dc.title | Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Bogaerts, Wim | |
| dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
| dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
| dc.identifier.eisbn | 978-1-943580-91-0 | |
| dc.source.numberofpages | 2 | |
| dc.source.peerreview | yes | |
| dc.source.conference | Conference on Lasers and Electro-Optics (CLEO) | |
| dc.source.conferencedate | MAY 09-14, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.journal | na | |
| imec.availability | Published - imec | |
