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A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node
dc.contributor.author | Tsai, Yi-Pei | |
dc.contributor.author | Chang, Yi-Han | |
dc.contributor.author | Wang, Jane | |
dc.contributor.author | Trivkovic, Darko | |
dc.contributor.author | Ronse, Kurt | |
dc.contributor.author | Kim, Ryoung-Han | |
dc.date.accessioned | 2022-09-16T02:49:55Z | |
dc.date.available | 2022-09-16T02:49:55Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4979-8 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844431900002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40427 | |
dc.source | WOS | |
dc.title | A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tsai, Yi-Pei | |
dc.contributor.imecauthor | Chang, Yi-Han | |
dc.contributor.imecauthor | Wang, Jane | |
dc.contributor.imecauthor | Trivkovic, Darko | |
dc.contributor.imecauthor | Ronse, Kurt | |
dc.contributor.imecauthor | Kim, Ryoung-Han | |
dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
dc.identifier.doi | 10.1117/12.2617415 | |
dc.identifier.eisbn | 978-1-5106-4980-4 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on DTCO and Computational Patterning | |
dc.source.conferencedate | APR 24-MAY 27, 2022 | |
dc.source.volume | 12052 | |
imec.availability | Under review |
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