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Design and Mask Optimization Toward Low Dose EUV Exposure
dc.contributor.author | Xu, Dongbo | |
dc.contributor.author | Gillijns, Werner | |
dc.contributor.author | Kim, Ryoung-han | |
dc.date.accessioned | 2022-09-16T02:49:56Z | |
dc.date.available | 2022-09-16T02:49:56Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4979-8 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844431900008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40430 | |
dc.source | WOS | |
dc.title | Design and Mask Optimization Toward Low Dose EUV Exposure | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Xu, Dongbo | |
dc.contributor.imecauthor | Gillijns, Werner | |
dc.contributor.imecauthor | Kim, Ryoung-han | |
dc.contributor.orcidimec | Xu, Dongbo::0000-0003-1159-2315 | |
dc.contributor.orcidimec | Gillijns, Werner::0000-0002-2430-7360 | |
dc.identifier.doi | 10.1117/12.2614268 | |
dc.identifier.eisbn | 978-1-5106-4980-4 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on DTCO and Computational Patterning | |
dc.source.conferencedate | APR 24-MAY 27, 2022 | |
dc.source.volume | 12052 | |
imec.availability | Under review |
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