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Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators
dc.contributor.author | Coenen, David | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Tsiara, Artemisia | |
dc.contributor.author | Oprins, Herman | |
dc.contributor.author | Simons, Veerle | |
dc.contributor.author | Pedreira, Olalla Varela | |
dc.contributor.author | Ban, Yoojin | |
dc.contributor.author | Van Campenhout, Joris | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2022-09-18T02:50:28Z | |
dc.date.available | 2022-09-18T02:50:28Z | |
dc.date.issued | 2022-SEP | |
dc.identifier.issn | 1530-4388 | |
dc.identifier.other | WOS:000851162500018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40455 | |
dc.source | WOS | |
dc.title | Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators | |
dc.type | Journal article | |
dc.contributor.imecauthor | Coenen, David | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Tsiara, Artemisia | |
dc.contributor.imecauthor | Oprins, Herman | |
dc.contributor.imecauthor | Simons, Veerle | |
dc.contributor.imecauthor | Pedreira, Olalla Varela | |
dc.contributor.imecauthor | Ban, Yoojin | |
dc.contributor.imecauthor | Van Campenhout, Joris | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Coenen, David::0000-0002-3732-1874 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Tsiara, Artemisia::0000-0002-5612-6468 | |
dc.contributor.orcidimec | Oprins, Herman::0000-0003-0680-4969 | |
dc.contributor.orcidimec | Simons, Veerle::0000-0001-5714-955X | |
dc.contributor.orcidimec | Van Campenhout, Joris::0000-0003-0778-2669 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.identifier.doi | 10.1109/TDMR.2022.3187822 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 417 | |
dc.source.endpage | 423 | |
dc.source.journal | IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY | |
dc.source.issue | 3 | |
dc.source.volume | 22 | |
imec.availability | Under review |
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