Publication:

Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators

Date

2022
Journal article
https://doi.org/10.1109/tdmr.2022.3187822
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Author(s)

Coenen, David  
;
Croes, Kristof  
;
Tsiara, Artemisia  
;
Oprins, Herman  
;
Simons, Veerle  
;
Varela Pedreira, Olalla  
;
Ban, Yoojin  
;
Van Campenhout, Joris  
;
De Wolf, Ingrid  

Journal

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

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1410 since deposited on 2022-09-18
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1439 since deposited on 2022-09-18
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