Publication:

Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators

Date

2022-07-01
Journal article
https://doi.org/10.1109/TDMR.2022.3187822
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dc.contributor.authorCoenen, David
dc.contributor.authorCroes, Kristof
dc.contributor.authorTsiara, Artemisia
dc.contributor.authorOprins, Herman
dc.contributor.authorSimons, Veerle
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorBan, Yoojin
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorCoenen, David
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTsiara, Artemisia
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorBan, Yoojin
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecCoenen, David::0000-0002-3732-1874
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecTsiara, Artemisia::0000-0002-5612-6468
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecBan, Yoojin::0000-0001-7319-8132
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2023-03-23T13:18:05Z
dc.date.available2022-09-18T02:50:28Z
dc.date.available2022-09-19T11:12:25Z
dc.date.available2023-03-23T13:18:05Z
dc.date.embargo2022-09-30
dc.date.issued2022-07-01
dc.description.wosFundingTextThis work was supported in part by the imec's Industry Affiliation R&D Program "Optical I/O."
dc.identifier.doi10.1109/TDMR.2022.3187822
dc.identifier.issn1530-4388
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40455
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage417
dc.source.endpage423
dc.source.issue3
dc.source.journalIEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
dc.source.numberofpages7
dc.source.volume22
dc.title

Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators

dc.typeJournal article
dspace.entity.typePublication
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